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Olympus WLI Infinity Corrected Interferometry Objectives

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  • Combines High Numerical Aperture and Broad Field of View
  • Thermal Compensation & Stability Features
  • Suitable for 3D Surface Metrology and Profilometry

Olympus WLI Infinity Corrected Interferometry Objectives' advanced optical design combines a high numerical aperture with a broad field of view, capturing fine surface details across large areas for visual clarity. Each objective features a built-in adjustment ring that compensates for temperature-induced focused shifts, allowing stability and consistent measurement accuracy even under unstable environmental conditions. These objectives are designed to be used with a 180mm focal length tube lens and are available in magnification of 10 – 50X. Olympus WLI Infinity Corrected Interferometry Objectives are ideal for 3D surface metrology and profilometry applications, including semiconductor inspection, precision machining, optical coating evaluation, and microelectronic characterization.

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